X-Ray Fluorescence (XRF) at the MCF

Elemental map of a chip

The MCF is pleased to announce the installation of its latest X-Ray tool, the Bruker Tornado XRay Fluorescence (XRF) spectrometer. Featuring two sources, two detectors, and an automatic stage with micron-level positioning accuracy; the XRF is capable of measuring elements from C to U with a spot size down to 20um for high resolution elemental mapping of materials and devices.

In addition, advanced software packages: XMethod – for layer thickness calculation and AMICS – for automated mineral determination are available to users for sample analysis. 

More information about the instrument and its capabilities will be updated on its webpage.

The tool is currently available for use and is available for requests for training on SUMS.

If you have questions about its capabilities please contact David Tavakoli: atavakoli@gatech.edu