The 8230 FE-SEM employs a novel cold field emission (CFE) gun for improved imaging and analytical performance. The newly-designed Hitachi CFE gun complements the inherent high resolution and brightness of conventional CFE with increased probe current and beam stability. This advanced source means that this SEM offers unmatched low-voltage imaging and comprehensive microanalysis while still maintaining very high resolution. Enhanced deceleration and selective energy filtering provide fine contrast differentiation at low accelerating voltages. The system is equipped with an Oxford EDS detector and has resolution of 0.8 nm @ 15KV / 1.1 nm @ 1KV.