Scanning Electron Microscopy (SEM)

The MCF has 5 SEM’s plus one FIB/SEM.

Manufacturer Model Type EDS Note Location
Hitachi SU 8010 FE-SEM N PTB 181
LEO 1530 FE-SEM Y PTB 176
Hitachi SU 8230 FE-SEM Y Marcus G135-A
Thermo Helios 5 FIB / SEM Y Cold stage Marcus G127-D
Zeiss Ultra 60 FE-SEM Y CL Marcus G131-A
Thermo Axia VPSEM Y Pettit  160

The Thermo Helios 5CX  FIB/SEM has an easy-lift manipulator and semi-automated SW that facilitate TEM lamella preparation and liftout.

  • HITACHI 8010

    FE-SEM

  • LEO 1530

    FE-SEM, EDS

  • Hitachi SU8230

    FE-SEM, EDS

  • Thermo Helios 5CX

    FIB/SEM, EDS, cold stage, in-situ nanoindentation

  • Zeiss Ultra 60

    FE-SEM, EDS, Cathodoluminescence (CL)

  • Thermo Axia ChemiSEM

    SEM, EDS, Variable-pressure mode