Veeco Dimension 3100 AFM

3D Nanoscale Imaging and Analysis

Veeco Dimension 3100 AFM

The Veeco AFM contacts the surfaces of samples using small probes  ~10 nanometers across.  Precise tracking of the probe’s position allows the system to measure sub-nanometer displacements of the probe tip.

By using special probes and/or optional sensors, it is possible to measure electrical, mechanical, magnetic or chemical properties of a sample at the same time and spatial resolution as the length data.


To reserve time or request training on this tool, click here or on the image at left to go to the AFM tool page on SUMS.

3-D view of functionalized Single-walled Carbon Nanotube c-AFM image showing height (left) and conductivity (right) of Al-filled anodic alumina wafer Phase Image of polymer texture after self-assembly from solution



AFM is one of the most straightforward but information-rich analysis techniques available.  Practically any type of material can be analyzed in air, in liquid, or – using a built-in gas purge – in a controlled ambient .  Built-in and plug-in sensors allow for multiple additional measurement modes.
System Details:

The AFM system has a variety of probe holders to do advanced SPM modes:


  • Can accommodate and scan a full 4″ diameter wafer or multiple smaller samples
  • Can accommodate samples up to ~1cm thick
  • Positioning accuracy to ~2 μm, positioning repeatability to ~5 μm
  • Integrated optical camera with zoom

Probe Holders:

  • Standard:  Supports contact mode, tapping mode, phase imaging, EFM, PFM
  • Nonmagnetic:  Supports MFM in addition to above modes; Cu-alloy clip
  • Fluid:  Supports contact mode, tapping mode, phase imaging in aqueous media and other fluids
  • Harmonics:  Supports Harmonics mechanical property measurements mode, tapping and contact modes
  • c-AFM:  Supports contact mode, c-AFM
  • Torsion:  Supports torsional measurement mode


AFM new software instructions

Tip convolution